Ockel M., Funk F., Janisch L., Franke J.: Evaluation of the Cold Atmospheric Plasma Metallization of Bare Dies with Copper Through Life Cycle Assessment In: Thomas Bauernhansl, Alexander Verl, Mathias Liewald, Hans-Christian Möhring (ed.): Production at the Leading Edge of Technology. Proceedings of the 13th Congress of the German Academic Association for Production Technology (WGP), Freudenstadt, November 2023, Cham: Springer Nature Switzerland, 2024, p. 417-427 (Lecture Notes in Production Engineering) ISBN: 978-3-031-47394-4 DOI: 10.1007/978-3-031-47394-4_41 BibTeX: Download